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As YMS solution designed for yield improvement like DACrux/TEST, DACrux/DMS (Defect Management System) saves data (defect inspection data, defect classification data and image data) from defect inspection and review equipment to server and DB. It monitors defect data in real time and alarms spec-out defect or abnormal error. DACrux/DMS supports variety of yield analysis function with the collected data. This allows fast feedback on defect root. It is optimum Defect Management System which provides base for yield prediction and yield modeling.
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