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 Defect map drawing by auto recipe info recognition
Real size defect map significantly reduces gap from actual defect size with its high precision drawing of 1/1000 §
Flexible defect drawing by freely controlling defect size to distinguish detailed defect
Unlimited defect map zoom in and zoom out function
View auto linked Review Image gallery on Defect Map display
Standardize defect inspection and review data result and save them in Database
Various interface protocol support such as FTP (get/receive) and NFS
Review Source File creation for users to review only filtered defect data
Remove the defect map drawing bottleneck caused by graphic handling
User can configure analysis and display conditions on UI
Analyze a specific defect map by users among many selected defect maps
Variety of monitoring functions such as process monitoring, data loss monitoring and equipment monitoring
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