|

Maintenance
Minimize information define per device definition
Access control with user security function
Diversified analysis method with setup option per user
Data loss minimization
Easy scalability for additional device
Data accuracy with auto data collection
Analysis
Intuitive and visual yield analysis environment
Systematic analysis method with defect data and image data
Defect management and analysis
Numeric management on major yield decreasing defect
Yield monitoring through defect analysis
Reporting
Real time defect monitoring
Immediate alarm on repeat defect
Fast process feedback on critical defect
Analysis report for decision making index

Semiconductor wafer and FPD factories which require high precision
Design mask product manufacturer, etc.

Standardize and systemically manage data that occur during defect monitoring process
Provide early process stabilization by concise analysis steps and high quality reports
Support correlated analysis to related data (Process, EDS test, memory test, equipment)
Able to react promptly to abnormal issue by real time defect data monitoring
Easy Equipment Interface with no need of any component or interface tool
Offer effective defect management and provide yield enhancement plan
Able to calculate systematic yield loss and random defect yield loss
Accurately understand equipment utilization
Simplify root cause discovery and analysis
Able yield prediction and yield modeling
|