 Conform to SEMI web service Interface A standard
Provide XML based data
Standard (SEMI E98, E120) equipment structure modeling
Data collection plan modeling
Metadata instance management for each CEM node (Locator)
Unit information, type information, classification management for each parameter
Metadata reliability management
CPU usage
Memory usage
Disk usage
Performance warning report
DeviceNetProfibusModbus
Endpoint CC-LinkEthernet/IP
OPC
DCP privilege management for each client
Multiple consumers can activate the same DCP simultaneously
List management for clients requesting an activation
Built-in DCP
Data validity check using data creation time
Add time stamp to collected data
Time synchronization with other systems (FAB Level)
|
